Material aspects of a-SiN:H based 2D direct X-ray sensor array

The possibility of creating an 2D X-ray sensor array on the base of a-SiN:H thin films without switching elements and an X-ray conversion layer is presented in this report. The behavior of a-SiN:H Thin-Film Diode under X-ray irradiation its limitations, and ways of increasing longterm stability and sensitivity of the sensor are discussed.

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