Enhanced doping efficiency of al-doped ZnO by atomic layer deposition using dimethylaluminum isopropoxide as an alternative aluminum precursor

Wu, Y; Potts, SE; Hermkens, PM; Knoops, HCM; Roozeboom, F; Kessels, WMM; (2013) Enhanced doping efficiency of al-doped ZnO by atomic layer deposition using dimethylaluminum isopropoxide as an alternative aluminum precursor. Chemistry of Materials , 25 (22) pp. 4619-4622. 10.1021/cm402974j .

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