Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD

Potts, SE; Profijt, HB; Roelofs, R; Kessels, WMM; (2013) Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD. Chemical Vapor Deposition , 19 (4-6) pp. 125-133. 10.1002/cvde.201207033 .

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