Hamilton, JR; Tennyson, J; Huang, S; Kushner, MJ; (2017) Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources. PLASMA SOURCES SCIENCE & TECHNOLOGY , 26 (6) 10.1088/1361-6595/aa6bdf .
http://ift.tt/2soaMUt
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Κυριακή 18 Ιουνίου 2017
Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources
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