Lauper, M; Fromme, P; Robyr, JL; Masserey, B; (2018) Silicon wafer defect detection using high frequency guided waves. In: Proceedings of SPIE - Volume 10600, Health Monitoring of Structural and Biological Systems XII; (2018). SPIE: Colorado, United States. Green open access
https://ift.tt/2OZ4VA6
Medicine by Alexandros G.Sfakianakis,Anapafseos 5 Agios Nikolaos,Crete 72100,Greece,tel :00302841026182 & 00306932607174
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Πέμπτη 9 Αυγούστου 2018
Silicon wafer defect detection using high frequency guided waves
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