Potts, SE; Kessels, WMM; (2013) Energy-enhanced atomic layer deposition for more process and precursor versatility. Coordination Chemistry Reviews , 257 (23-24) pp. 3254-3270. 10.1016/j.ccr.2013.06.015 .
http://ift.tt/2pfRxtd
Medicine by Alexandros G.Sfakianakis,Anapafseos 5 Agios Nikolaos,Crete 72100,Greece,tel :00302841026182 & 00306932607174
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Energy-enhanced atomic layer deposition for more process and precursor versatility
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