Potts, SE; Keuning, W; Langereis, E; Dingemans, G; Van De Sanden, MCM; Kessels, WMM; (2010) Low temperature plasma-enhanced atomic layer deposition of metal oxide thin films. Journal of the Electrochemical Society , 157 (7) pp. 66-74. 10.1149/1.3428705 .
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Παρασκευή 26 Μαΐου 2017
Low temperature plasma-enhanced atomic layer deposition of metal oxide thin films
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